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1 The purpose of this Standard is to standardize requirements for potassium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards
SEMI F27 — Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
本スタンダードは，Gases Global Technical Committeeで技術的に承認されている。現版は2013年6月4日，global Audits and Reviews Subcommitteeにて発行が承認された。2013年6月にwww
For measurements on transparent conducting oxide (TCO) films
G00800 - SEMI G8 - 金めっきの試験方法 Revision:Default Title 1 The purpose of thisglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1994 : Referenced SEMI Standards None.
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