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E01800 - SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller StdTpc-Silicon quality control and manufacturing

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Description

quality control and manufacturing

SEMI E130-1017 (technical revision)

The scope of this Document is all grades of tetraethylorthosilicate used in the semiconductor industry

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E01800 - SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller StdTpc-Silicon quality control and manufacturing1 Purpose 1. 1 The purpose of this Guide is to establish a uniform, worldwide means to describe the temperature parameters which are characteristic of mass flow controllers. It is intended to prevent confusion and misunderstanding between manufacturers and users. 2 Scope 2. 1 This Guide contains definitions of terms which describe the effects of temperature upon mass flow controllers as used in the semiconductor industry. Referenced SEMI Standards

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