C00306 - SEMI C3.6 - Specification for Phosphine (PH3) in Cylinders, 99.98% Quality Revision:SEMI C3.6-0710 (Reapproved 0815) - Superseded It is shipped in cylinders

It is shipped in cylinders as a liquefied gas under its own vapor pressure

replaced by SEMI C70

SEMI A1-1025 (technical revision)

本文書は

C00306 - SEMI C3.6 - Specification for Phosphine (PH3) in Cylinders, 99.98% Quality Revision:SEMI C3.6-0710 (Reapproved 0815) - Superseded It is shipped in cylindersThe purpose of this Document is to provide specifications for phosphine (PH3) that are used in the semiconductor industry. This Document covers requirements for phosphine used in the semiconductor industry. Referenced SEMI Standards (purchase separately) SEMI C3 Specification for Gases Revision History SEMI C3. 6 0421 (technical revision) SEMI C3. 6 0710 (Reapproved 0815) SEMI C3. 6 0710 (technical revision) SEMI C3. 6 0701 (technical revision) SEMI