E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers Revision:SEMI E1-0697 (Reapproved 1102)E - Superseded SEMI E30-0298 (technical revision)

SEMI E30-0298 (technical revision)

SEMI M12 — Specification for Serial Alphanumeric Marking of the Front Surface of Wafers

if not all

They are each published and sold separately

E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers Revision:SEMI E1-0697 (Reapproved 1102)E - Superseded SEMI E30-0298 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification provides the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 in., 100 mm, 125 mm, and 150 mm diameter wafers. It also includes some related