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C00330 - SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality Revision:SEMI C3.30-96 (Reapproved 0999) - Replaced SEMI C56-0224 (technical revision)

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Description

SEMI C56-0224 (technical revision)

orgで入手可能となる。初版は1993年発行。前版は2002年11月発行。

instrument configuration

SEMI文書,特にSEMI P35から構造や用語を引用している。

C00330 - SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality Revision:SEMI C3.30-96 (Reapproved 0999) - Replaced SEMI C56-0224 (technical revision)NOTICE: This document was replaced by SEMI C58 in 2005. This standard is intended to establish the definitions, general procedures, specifications, and analytical procedures for hydrogen (H2), bulk, 99. 9997% quality. Where an analytical procedure different from that provided is substituted by a supplier or user, the burden of proof is on said supplier or user to confirm the equivalency. It should be noted that the following list of criteria was

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