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F11900 - SEMI F119 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution StdTpc-Leadframes 注意: 本文書は,編集上の修正を伴い,再承認された。

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注意:  本文書は,編集上の修正を伴い,再承認された。

A complete purchase specification requires that additional characteristics be specified along with test methods suitable for determining their magnitude

orgで入手可能となる。初版は1995年発行。前版は2007年3月発行。

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F11900 - SEMI F119 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution StdTpc-Leadframes 注意: 本文書は,編集上の修正を伴い,再承認された。The purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing. This Test Method is an adaptation of ASTM G48 and is intended to differentiate between stainless steels of differing compositions or processing that may affect the corrosion performance of the wetted surfaces. Detailed information on the

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