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It is colorless and nonflammable
本仕様では，周波数134
2-1109 (Reapproved 0416)
epitaxial or other layer condition and for monitoring thermal and mechanical effects on the sori of wafers during device processing
P02800 - SEMI P28 - 集積回路製造用オーバーレイ計測テストパターン Revision:SEMI P28-96 (Reapproved 0707) - Inactive It is colorless and nonflammableNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Micropatterning Committee2007425global Audits and Reviews Subcommittee20076www. semi. org1996 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.
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