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SEMI T7-0303 (Reapproved 0709)
SEMI C1 — Specification for Reagents
and information technology equipment
• Description of an approach for compliance verification testing
F08300 - SEMI F83 - 1.125インチタイプ2ファスナー構造サーフェスマウント型ガス供給システム用2ポートコンポーネント（MFC/MFMを除く）の寸法のための仕様 StdTpc-Jig ID SEMI T7-0303 (Reapproved 0709)global Gases Technical Committee2012830global Audits and Reviews Subcommittee201210www. semiviews. org www. semi. org2004320123 1. 1252 22 308 kPa (44. 7 psia)50 slm20 C 3445 kPa (500 psia) Referenced SEMI Standards SEMI E49. 8 Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment SEMI F20 Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used
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US$ 181.66